Researchers from the Institute of Metal Research of the Chinese Academy of Sciences have developed a new class of ...

Semiconductor engineers leveraged manufacturing techniques developed for computer chips to create microscopic MEMS devices. Fabrication methods for MEMS sensors, such as layer deposition, ...

MEMS are primarily transducer systems that can control or sense chemical, optical, or physical quantities, such as fluids, acceleration, or radiation. A MEMS device/transducer possesses an electrical ...

DUBLIN--(BUSINESS WIRE)--Research and Markets has announced the addition of the "The Global MEMS Device, Equipment, and Materials Markets: Forecasts and Strategies for Vendors and Foundries" report to ...

Introduction to microelectromechanical devices with an emphasis on their manufacturing and mechanical behavior. Material properties, microfabrication technology, mechanical behavior of of ...

The unique requirements of microelectromechanical systems (MEMS) call for specialized materials. The versatility of epoxies and adhesives are often capable of providing the necessary properties to ...

Paul Bergstrom’s research interests include the integration of microelectromechanical (MEMS) elements with microelectronics processing in ways which minimize the impact of the MEMS processing on the ...

Paul Bergstrom’s research interests include the integration of microelectromechanical (MEMS) elements with microelectronics processing in ways which minimize the impact of the MEMS processing on the ...