One of the main challenges in developing semiconductor chip technology is making electronic components smaller and more effective. This difficulty is most noticeable in lithography, which is the ...

After Boris Johnson’s address to the nation on Sunday 3 May, the government published a 60-page document called Our Plan to Rebuild. In the government document, it says people should "wear a ...

Concept of mask/wafer co-optimization by moving the shot with mask and wafer double simulation to minimize wafer error. VSB shot configurations and its corresponding ...