IEEE

Millimeter-Wave Wideband ±45° Dual-Polarized Wide-Angle Scanning Phased Array Antenna

Abstract: This letter presents a novel millimeter-wave (mmWave) wideband ±45° dual-polarized (DP) phased array antenna (PAA) that incorporates heterogeneous beam elements (HBEs) to enable wide-angle ...
IEEE

Effect of process gas on Side Wall Angle in Silicon Trench Etching

Abstract: The side wall angle is the main parameter to measure the profile of the side wall of trench. In this paper^^81CHBr, SF$_{6} , \mathrm{O}_{2}$, CF 4 are used as the main etching gases, and ...