Enhancing defect detection in semiconductor manufacturing through physics-based synthetic imaging for micro- and nano-scale structures
spiedigitallibrary.org
Enhancing defect detection in semiconductor manufacturing through physics-based synthetic imaging for micro- and nano-scale structures
This study investigates the application of physics-based synthetic imaging to enhance defect detection in semiconductor manufacturing. Leveraging optical principles, this approach simulates realistic interactions such as diffraction and interference, addressing limitations of generative neural networks like overfitting and lack of diversity ...
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